제품 및 서비스에 대해 자세히 알아보기
INFICON Quantus® HP100
Description
A Newly Developed Optical Gas Analyzer for Semiconductor Manufacturing
This webinar will present an overview of the newly developed optical gas analyzer, Quantus HP100, based on self-plasma optical emission spectroscopy technology.
As a sister gas analyzer for the market-proven Quantus LP100 under the INFICON optical sensor portfolio, Quantus HP100 provides unparalleled performance to many critical semiconductor applications, such as leak detection, endpoint detection and gas analysis.
It has a much broader operational pressure range - up to 450 Torr without a pumping system - and it boosts the detection limit down to sub-ppm level.
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전기차, 수소차등의 폭발적인 성장과 반도체 미세공정이 증가함에 따라 누설에 대한 중요성이 나날이 증가하고 있습니다.
Residual Gas Analyzer는 실시간으로 진공 시스템의 공정을 관측하기에 용이한 센서입니다.
당사에서는 반도체/디스플레이 산업에서 박막 증착 공정에 균일성, 수율, 반복성 및 처리량을 향상하기 위한 필수적인 QCM(Quartz Crystal Microbalance)
Fabguard IPM (integrated process monitor) 는 Residual Gas Analyzer 를 조작하기 위한 강력한 프로그램 입니다.
Fabguard Explorer 는 Residual Gas Analyzer를 조작하기 위한 효율적인 프로그램 입니다.
인피콘은 HVAC/R 서비스 및 수리를 위해 신뢰할 수 있는 정확하고 신뢰할 수 있는 서비스 툴을 제공합니다.
NFICON의 He Leak Detector를 이용하면 공정 설비의 유지 보수 필요성이 줄어듦과 동시에 더욱 안전한 환경에서 작업할 수 있습니다.
Quartz crystal microbalance (QCM) technology has been used for decades to control deposition rate and thickness for the most complex processes seen in the ophthalmic, optical, display, and solar markets. INFICON has recently made a new advancement in QCM technology to address a problem seen across all of these industries related to QCM temperature effects. Thermal shock can cause QCM thickness errors which can decrease yield and increase manufacturing costs if temperature is not accounted for correctly.
Temperature impacts the frequency measurement and can create false mass readings. Thin film deposition controllers currently on the market have no good way of distinguishing frequency shifts related to mass from frequency shifts related to temperature, resulting in thickness errors and poor PID control. This can be detrimental to complex coating processes due to the low deposition rates and incredibly thin layers required. Thermal shocks can occur at any point in a deposition process and can cause unnecessary PID-loop corrections, triggering non-uniform deposition in respect to time. This means that the quality throughout the bulk of the material is inadequate. For very thin films, the thickness termination may not be at the real intended thickness because the process time window is small compared to the time allowed for a QCM to recover from a thermal shock event.
INFICON has patented a new temperature compensation technique for SC-cut crystals to remove the effects of temperature variation on the QCM without the need for additional hardware or custom and expensive sensors.
Please join us for the ‘Temperature Compensation for QCMs’ webinar, hosted by Sheldon Wayman, Product Engineer for INFICON Inc.
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