Controllers

IC6

Making Excellence Repeatable

ACADEMY

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The IC6 Thin Film Deposition Controller provides exceptional value by combining the proven performance of INFICON thin film controllers with unique features, all designed for you to achieve the most from your deposition process.

The IC6 uses our ModeLock frequency measurement system to provide stable, high-resolution rate and thickness measurement with an industry-leading rate resolution of 0.00433 Å/s every 1/10 second. No other quartz crystal controller has the performance, quality, and features of the IC6, allowing you to make excellence repeatable.

특징

INFICON ModeLock technology ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
Auto Z improves thickness accuracy by automatically determining the Z-ratio as material is deposited
Codeposition of up to six sources simultaneously
Color TFT LCD display makes it easy to see what's going on with your process
+/-0.0035 Hz over 100ms sample
USB data storage for screen shots, recipe storage and data logging
Powerful I/O with flexibility to integrate into simple or complex systems (using expandable Inputs (28) and Outputs (24 Relays, 14 TTL outputs), and use of logic functions (100 logic statements)
6 DAC outputs standard, 6 additional optional for source control, rate or thickness monitoring
Can accommodate up to 50 processes of 200 layers each and processes can be linked together for a maximum of 10,000 layers
Multiple sensor averaging for up to 8 sensors
4 meter XIU option provides the ability to use long in-vacuum sensor cables for large systems
Optional Ethernet communications
Optional IC6 Configuration Editor Software (part number 781-620-G1) - LabVIEW® based Windows® software that allows for offline creation and editing of IC6 configuration files and converts IC/5 configuration files to IC6 format.
RoHS compliant

일반적인 응용 분야

High End Optical Coating

사양서

측정 성능
두께 및 비율 해상도/측정(1)	±0.00433 Å
측정 주파수 범위	6.0 to 4.5 MHz (fixed)

공정 처방 및 데이터 관리
재료 프로그램	32
공정 층(공정당)	200
공정	50 (processes can be linked together)

소스 수(2)	up to 6

(1) Tooling/density = 100/1, fundamental frequency = 6 MHz (2) The IC6 has 6 DAC outputs standard, 6 more can be added as an option. Any of the 12 can be configured as source control voltages or recorder outputs however the number of sources that can be controlled simultaneously is 6

파트 넘버

Accessories

Consumables

Name	Description
Front Load Single Sensor	Front Load Single Sensor
Front Load Dual Sensor	Front Load Dual Sensor
Cool Drawer Single Sensor	Cool Drawer Single Sensor
Cool Drawer Dual Sensor	Cool Drawer Dual Sensor
Easy Rate Single Sensor	Easy Rate Single Sensor
Easy Rate Dual Sensor	Easy Rate Dual Sensor
UHV Bakeable Sensor	UHV Bakeable Sensor
ALD Sensor	ALD Sensor
Sputtering Sensor	Sputtering Sensor
CrystalSix® Sensor	CrystalSix® Sensor
Crystal 12® Sensor	Crystal 12® Sensor
Accessories and Replacement Parts
Part Number	Description
779-220-G1	CrystalTwo® Switch, 15.2 cm (6 in.) BNC Cables
779-220-G2	CrystalTwo® Switch, 50.8 cm (20 in.) BNC Cables
Oscillator kits	(Includes oscillator and cables)
781-611-G15	XIU PKG with 4.6 m (15 ft.) cable - For use with Cygnus 2, IC6, or XTC/3
781-611-G30	XIU PKG with 9.1 m (30 ft.) cable - For use with Cygnus 2, IC6, or XTC/3
781-611-G50	XIU PKG with 15.2 m (50 ft.) cable - For use with Cygnus 2, IC6, or XTC/3
781-611-G100	XIU PKG with 30.5 m (100 ft.) cable - For use with Cygnus 2, IC6, or XTC/3
781-612-G15	4m XIU PKG with 4.6 m (15 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-612-G30	4m XIU PKG with 9.1 m (30 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-612-G50	4 m XIU PKG with 15.2 m (50 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-612-G100	4m XIU with 30.5 m (100 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-613-G15	4m XIU PKG with 4.6 m (15 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-613-G30	4m XIU PKG with 9.1 m (30 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthough) cable - For use with Cygnus 2, IC6, or XTC/3
781-613-G50	4m XIU PKG with 15.2 m (50 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-613-G100	4m XIU PKG with 30.5 m (100 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
Oscillator Only	(No cables included)
781-600-G1	XIU (oscillator) - For XIU to sensor head cable lengths of 15 to 183 cm (6 to 72 in.) - For use with Cygnus 2, IC6, or XTC/3
781-600-G2	XIU (oscillator) - for XIU to sensor head cable lengths of 3 to 4 m (118 to 157 in.) - For use with Cygnus 2 or IC6
Cables
600-1261-P100	30.5 (100 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU
600-1261-P15	4.6 m (15 ft.) cable, Cgynus 2, IC6 or XTC/3 controller to XIU
600-1261-P30	9.1 m (30 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU
600-1261-P50	15.2 m (50 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU
755-257-G6	15.2 cm (6 in.) BNC cable, XIU to vacuum feedthrough
Configuration Editor Software
781-620-G1	IC6 Configuration Editor Software - LabVIEW® based Windows® software that allows for offline creation and editing of IC6 configuration files and converts IC/5 configuration files to IC6 format.