Monitors
IMM-100
Making Excellence Repeatable
ACADEMY
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Product configurator
Gemini™ MxG5xx
Type
Sensor version
Ionization chamber
Emmision current
Flange connection to vacuum chamber
Switching function
Electrical connection
Digital interface
Analog output signal
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Protect and Grow Your Profit with Precision Rate and Thickness Monitoring
IMM-100 is a deposition monitor built with ModeLock technology to maximize reproducibility and uniformity with the highest thickness accuracy, best measurement resolution, and lowest rate noise.
With the oscillator built-in IMM-100 can be easily integrated into an EtherCAT system with minimal hardware and footprint. This powerful and precise measurement monitor is sure to bring a new level of performance to your process.
특징
- INFICON ModeLock technology provides the longest crystal life and ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
- Maximize yield with the best QCM thickness measurement possible
- Single channel rate and thickness monitor without unnecessary added features to minimize cost
- ±0.0035 Hz over 100 ms sample
- EtherCAT communications for seamless integration
- Compact size to minimize integration costs by saving tool real estate
- Expert application support, able to discuss unique application needs and give greater support than the competition
- RoHS compliant
일반적인 응용 분야
- OLED Applications
사양서
| Sensor inputs | 1 |
| 측정 주파수 범위 | 6.0 to 4.5 MHz (fixed) |
| Rate and thickness resolution | 0.0042 Å (new crystal); 0.0076 Å (crystal @ 4.5 MHz) over 100 ms sample for material density = 1.0, Z-Ratio = 1.0 |
| Communication type | EtherCAT, 2 RJ45 jacks, supports data daisy chaining. Explicit device ID via switches |
Part Number
Accessories
Consumables
| Part Number | Description |
| 785-600-G1 | IMM-100 Thin Film Deposition Monitor |
| Part Number | Description |
| Optional Power Supplies | The power supplies listed below are rated for an input of 100 to 249 V (ac), 2 A, 50 to 60 Hz with an output of 24V (dc), 3.34 A, 80 W maximum. |
| 961-021-G1 | Power Supply Kit 80 - 250 VAC / 4 ft (1.2m) US plug |
| 961-021-G2 | Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 15 ft (4.5m) Extension Cable |
| 961-021-G3 | Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 30 ft (9m) Extension Cable |
| 961-021-G4 | Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug |
| 961-021-G5 | Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 15 ft (4.5m) Extension Cable |
| 961-021-G6 | Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 30 ft (9m) Extension Cable |
| 961-021-G7 | Power Supply Kit IL 240V |
| 961-021-G8 | Power Supply Kit IL 4.5 M Extension |
| 961-021-G9 | Power Supply Kit IL 9.0 M Extension |
| 961-021-G10 | Power Supply Kit UK 240V |
| 961-021-G11 | Power Supply Kit UK 4.5 M Extension |
| 961-021-G12 | Power Supply Kit UK 9.0 M Extension |
| Optional Mounting Bracket | |
| 785-202-G1 | Mounting bracket with four clean room compatible shock absorbing, female-to-female, stainless steel mounting feet |
| 785-201-G1 | Mounting bracket with four shock absorbing, male-to-female, black Neoprene rubber mounting feet |
| Optional Communications Cable | |
| 600-1190-P1 | ETHERNET COMUNICATION CABLE 1 METER |
| 600-1190-P2 | SPEC- ETHERNET COMMUNICATION CABLE .3M |
| 600-1190-P4 | ETHERNET COMUNICATION CABLES 4.3 METER |
| 600-1190-P8 | Ethernet 7m cable |
| 600-1190-P15 | Ethernet 15m cable |
| Name | Description |
| Quartz Monitor Crystals | Quartz Monitor Crystals |
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