Monitors

SemiQCM® SR Sensors for Precursor Monitoring

Making Excellence Repeatable

ACADEMY

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Protect and Grow Your Profit with Precision Rate and Thickness Monitoring

The SemiQCM SR sensor is one component of a system for precursor monitoring, with the other components being an IMM-200 and FabGuard (version 19.12.00-a or higher).

Semi Process Monitoring can be used in semiconductor applications for endpoint detection and fault elimination by monitoring the amount of precursor in the foreline or chamber exhaust. The use of an in situ QCM provides affordable process monitoring and improved semiconductor process profitability.

The failure to deliver precursor to a wafer can be detected in as little as one wafer.

장점

QCM data monitored at 10 Hz
FabGuard correlates QCM data to tool state and process step
Precise measurement of deposition or etch rates
Sensitivity & precision for sub-monolayer thickness measurement

특징

Real-time, in situ process monitoring
Prevent over-etching, identify chamber clean end point
Identify equipment or process state fault

일반적인 응용 분야

Semiconductor Manufacturing

사양서

Maximum Temperature	200°C

Sensor Head Size (maximum envelope)	23.9 mm O.D. x 29.2 mm (0.94 in. O.D. x 1.15 in.)

Sensor Length (in vacuum)	50–150 mm (1.97–5.91 in.)

Mounting Feedthrough	ISO KF/CF flange

Materials
Body and Holder	304 stainless steel
Springs	Au-plated BeCu
Coaxial Line	4.8 mm (0.188 in.) O.D. stainless steel
Other Mechanical Parts	18-8 or 304 stainless steel, nickel C276
Insulators	>96% Al₂O₃ in vacuum: Teflon^® used elsewhere
Wire	Ni in vacuum, Ni-plated Cu elsewhere
Braze	Vacuum-process high-temperature NiCr alloy
Crystal	14.0 mm (0.551 in.) diameter

전체 사양 다운로드

파트 넘버

Part Number	Description
750-7000-G5	SEMI QCM SENSOR ASSY 50MM
750-7000-G6	Semi QCM Sensor Assy 60mm
750-7000-G7	Semi QCM Sensor Assy 70mm
750-7000-G8	Semi QCM Sensor Assy 80mm
750-7000-G9	Semi QCM Sensor Assy 90mm
750-7000-G10	Semi QCM Sensor Assy 100mm
750-7000-G11	Semi QCM Sensor Assy 110mm
750-7000-G12	Semi QCM Sensor Assy 120mm
750-7000-G13	Semi QCM Sensor Assy 130mm
750-7000-G14	Semi QCM Sensor Assy 140mm
750-7000-G15	Semi QCM Sensor Assy 150mm