Pirani Gauges

PSG50x & PSG51x

ATM~중간진공 게이지

ACADEMY

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INFICON 피라니 표준 게이지인 PSG500, PSG502-S, PSG510-S, PSG512-S에는 시장에서 제공되는 최첨단 디지털 피라니 기술이 적용되어 있습니다. 견고한 스테인리스 스틸 센서 셀 및 소형 디자인 덕분에 반도체 시스템에 사용하거나 전면 진공 라인 등의 표준 적용개소에 사용하기에 적합합니다.

장점

간단한 푸시 버튼 ATM 및 HV 조정
공간 절약형의 견고한 디자인
알루미늄 하우징
모든 방향으로 장착 가능
금속 씰링 피드스루가 있는 스테인레스강 측정 셀
로그 신호 출력으로 손쉬운 통합
나사산 연결부가 있는 10 bar 절대 과압
250°C 베이크 가능 버전
부식성 분야를 위한 니켈 필라멘트 옵션
부식성이 매우 강한 분야에 적합한 세라믹 피드스루(PSG510 및 PSG512)
셋포인트 옵션
RoHS 준수

일반적인 응용 분야

Controlling high vacuum ionization gauges
Fore vacuum pressure monitoring
Safety circuits in vacuum systems
General vacuum measurement and control in the fine and rough vacuum range

사양서

PSG500 tungsten

PSG500-S tungsten, setpoints

PSG502-S nickel, setpoints

PSG510-S tungsten, setpoints, ceramic feedthroughs

PSG512-S nickel, setpoints, ceramic feedthroughs

Measurement range	V	+1.9 … +10.0

Accuracy(N₂)
1 x 10^-3 … 100 mbar	% of reading	±15%
5 x 10^-4 … 1 x 10^-3 mbar	% of reading	±50%
100 … 1000 mbar	% of reading	±50%

Repeatability (air)
1 x 10^-3 … 100 mbar	% of reading	2%

Admissible temperature
Operation	°C	+5 … +60
Vacuum connection (1)	°C	80 / 250 ⁽²⁾
Storage	°C	-20 … +65

Supply voltage
At gauge	V (dc)	+14 …+30
Ripple	V (p-p)	≤1

Power consumption	W	≤1

Setpoint
Number of setpoints	Number of setpoints	none
Setting range	mbar	‒
Hysteresis	% of reading	‒
Relay contact		‒
Relay contact: Switching time	ms	‒

Materials exposed to vacuum		glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435

Measurement range	V	+1.9 … +10.0

Accuracy(N₂)
1 x 10^-3 … 100 mbar	% of reading
5 x 10^-4 … 1 x 10^-3 mbar	% of reading
100 … 1000 mbar	% of reading

Repeatability (air)
1 x 10^-3 … 100 mbar	% of reading	2%

Admissible temperature
Operation	°C	+5 … +60
Vacuum connection (1)	°C	80 / 250 ⁽²⁾
Storage	°C	-20 … +65

Supply voltage
At gauge	V (dc)	+14 …+30
Ripple	V (p-p)	≤1

Power consumption	W	≤1

Setpoint
Number of setpoints	Number of setpoints	2
Setting range	mbar	2 x 10^-3 … 500
Hysteresis	% of reading	10% above lower threshold
Relay contact		30
Relay contact: Switching time	ms	<20

Materials exposed to vacuum		glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435

Measurement range	V	+1.9 … +10.0

Accuracy(N₂)
1 x 10^-3 … 100 mbar	% of reading
5 x 10^-4 … 1 x 10^-3 mbar	% of reading
100 … 1000 mbar	% of reading

Repeatability (air)
1 x 10^-3 … 100 mbar	% of reading	2%

Admissible temperature
Operation	°C	+5 … +60
Vacuum connection (1)	°C	80 / 250 ⁽²⁾
Storage	°C	-20 … +65

Supply voltage
At gauge	V (dc)	+14 …+30
Ripple	V (p-p)	≤1

Power consumption	W	≤1

Setpoint
Number of setpoints	Number of setpoints	2
Setting range	mbar	2 x 10^-3 … 500
Hysteresis	% of reading	10% above lower threshold
Relay contact		30
Relay contact: Switching time	ms	<20

Materials exposed to vacuum		glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435

Measurement range	V	+1.9 … +10.0

Accuracy(N₂)
1 x 10^-3 … 100 mbar	% of reading
5 x 10^-4 … 1 x 10^-3 mbar	% of reading
100 … 1000 mbar	% of reading

Repeatability (air)
1 x 10^-3 … 100 mbar	% of reading	2%

Admissible temperature
Operation	°C	+5 … +60
Vacuum connection (1)	°C	80 / 250 ⁽²⁾
Storage	°C	-20 … +65

Supply voltage
At gauge	V (dc)	+14 …+30
Ripple	V (p-p)	≤1

Power consumption	W	≤1

Setpoint
Number of setpoints	Number of setpoints	2
Setting range	mbar	2 x 10^-3 … 500
Hysteresis	% of reading	10% above lower threshold
Relay contact		30
Relay contact: Switching time	ms	<20

Materials exposed to vacuum		AI₂O₃, Ni, DIN 1.3981 / 1.4305 / 1.4435

Measurement range	V	+1.9 … +10.0

Accuracy(N₂)
1 x 10^-3 … 100 mbar	% of reading
5 x 10^-4 … 1 x 10^-3 mbar	% of reading
100 … 1000 mbar	% of reading

Repeatability (air)
1 x 10^-3 … 100 mbar	% of reading	2%

Admissible temperature
Operation	°C	+5 … +60
Vacuum connection (1)	°C	80 / 250 ⁽²⁾
Storage	°C	-20 … +65

Supply voltage
At gauge	V (dc)	+14 …+30
Ripple	V (p-p)	≤1

Power consumption	W	≤1

Setpoint
Number of setpoints	Number of setpoints	2
Setting range	mbar	2 x 10^-3 … 500
Hysteresis	% of reading	10% above lower threshold
Relay contact		30
Relay contact: Switching time	ms	<20

Materials exposed to vacuum		AI₂O₃, Ni, DIN 1.3981 / 1.4305 / 1.4435

전체 사양 다운로드

Part Number

Accessories

Spare Parts

PSG500 tungsten

350-060	PSG500 DN 16 ISO-KF.
350-061	PSG500 1/8" NPT
350-062	PSG500 DN 16 CF-R
350-063	PSG500 1/2" Tube
350-064	PSG500 8-VCR (1/2")
350-065	PSG500 4-VCR (1/4")
350-066	PSG500 7/16-20 UNF
350-067	PSG500 DN 16 ISO-KF, ext. body
350-068	PSG500 DN 16 CF-R, ext. body

PSG500-S tungsten, setpoints

350-080	PSG500-S DN 16 ISO-KF
350-081	PSG500-S 1/8" NPT
350-082	PSG500-S DN 16 CF-R
350-083	PSG500-S 1/2" Tube
350-084	PSG500-S 8-VCR (1/2")
350-085	PSG500-S 4-VCR (1/4")
350-086	PSG500-S 7/16-20 UNF
350-087	PSG500-S DN 16 ISO-KF, ext. body
350-088	PSG500-S DN 16 CF-R, ext. body

PSG502-S nickel, setpoints

350-140	PSG502-S DN 16 ISO-KF
350-141	PSG502-S 1/8" NPT
350-142	PSG502-S DN 16 CF-R
350-143	PSG502-S 1/2" Tube
350-144	PSG502-S 8-VCR (1/2")
350-145	PSG502-S 4-VCR (1/4")
350-146	PSG502-S 7/16-20 UNF
350-147	PSG502-S DN 16 ISO-KF, ext. body
350-148	PSG502-S DN 16 CF-R, ext. body

PSG510-S tungsten, setpoints, ceramic feedthroughs

350-200	PSG510-S DN 16 ISO-KF

PSG512-S nickel, setpoints, ceramic feedthroughs

350-300	PSG512-S DN 16 ISO-KF

PSG500 tungsten

211-001	Clamping ring DN 10-16 ISO-KF
350-050	Power Supply, PxG5xx,G-Cable FCC,1.8m

PSG500-S tungsten, setpoints

211-001	Clamping ring DN 10-16 ISO-KF
350-050	Power Supply, PxG5xx,G-Cable FCC,1.8m

PSG502-S nickel, setpoints

211-001	Clamping ring DN 10-16 ISO-KF
350-050	Power Supply, PxG5xx,G-Cable FCC,1.8m

PSG510-S tungsten, setpoints, ceramic feedthroughs

211-001	Clamping ring DN 10-16 ISO-KF
350-050	Power Supply, PxG5xx,G-Cable FCC,1.8m

PSG512-S nickel, setpoints, ceramic feedthroughs

211-001	Clamping ring DN 10-16 ISO-KF
350-050	Power Supply, PxG5xx,G-Cable FCC,1.8m

PSG500 tungsten

350-920	PSG500 Spare Sensor DN 16 KF
350-921	PSG500 Spare Sensor 1/8" NPT
350-922	PSG500 Spare Sensor DN 16 CF-R
350-923	PSG500 Spare Sensor 1/2" Tube
350-924	PSG500 Spare Sensor 8-VCR (1/2")
350-925	PSG500 Spare Sensor 7/16-20 UNF
350-926	PSG500 Spare Sensor 4-VCR (1/4")
350-927	PSG500 Spare Sensor DN 16 KF,ext.body
350-928	PSG500 Spare Sensor DN 16 CF-R,ext.body

PSG500-S tungsten, setpoints

350-920	PSG500 Spare Sensor DN 16 KF
350-921	PSG500 Spare Sensor 1/8" NPT
350-922	PSG500 Spare Sensor DN 16 CF-R
350-923	PSG500 Spare Sensor 1/2" Tube
350-924	PSG500 Spare Sensor 8-VCR (1/2")
350-925	PSG500 Spare Sensor 7/16-20 UNF
350-926	PSG500 Spare Sensor 4-VCR (1/4")
350-927	PSG500 Spare Sensor DN 16 KF,ext.body
350-928	PSG500 Spare Sensor DN 16 CF-R,ext.body

PSG502-S nickel, setpoints

350-900	PSG502 Spare Sensor DN 16 KF
350-901	PSG502 Spare Sensor 1/8" NPT
350-902	PSG502 Spare Sensor DN 16 CF-R
350-903	PSG502 Spare Sensor 1/2" Tube
350-904	PSG502 Spare Sensor 8-VCR (1/2")
350-905	PSG502 Spare Sensor 7/16-20 UNF
350-906	PSG502 Spare Sensor 4-VCR (1/4")
350-907	PSG502 Spare Sensor DN 16 KF,ext.body
350-908	PSG502 Spare Sensor DN 16 CF-R,ext.body

PSG510-S tungsten, setpoints, ceramic feedthroughs

350-930	PSG510 Spare Sensor DN 16 KF

PSG512-S nickel, setpoints, ceramic feedthroughs

350-940	PSG512 Spare Sensor DN 16 KF