Pirani Gauges
PSG50x & PSG51x
ATM~중간진공 게이지
ACADEMY
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INFICON 피라니 표준 게이지인 PSG500, PSG502-S, PSG510-S, PSG512-S에는 시장에서 제공되는 최첨단 디지털 피라니 기술이 적용되어 있습니다. 견고한 스테인리스 스틸 센서 셀 및 소형 디자인 덕분에 반도체 시스템에 사용하거나 전면 진공 라인 등의 표준 적용개소에 사용하기에 적합합니다.
장점
- 간단한 푸시 버튼 ATM 및 HV 조정
- 공간 절약형의 견고한 디자인
- 알루미늄 하우징
- 모든 방향으로 장착 가능
- 금속 씰링 피드스루가 있는 스테인레스강 측정 셀
- 로그 신호 출력으로 손쉬운 통합
- 나사산 연결부가 있는 10 bar 절대 과압
- 250°C 베이크 가능 버전
- 부식성 분야를 위한 니켈 필라멘트 옵션
- 부식성이 매우 강한 분야에 적합한 세라믹 피드스루(PSG510 및 PSG512)
- 셋포인트 옵션
- RoHS 준수
일반적인 응용 분야
- Controlling high vacuum ionization gauges
- Fore vacuum pressure monitoring
- Safety circuits in vacuum systems
- General vacuum measurement and control in the fine and rough vacuum range
사양서
PSG500 tungsten
PSG500-S tungsten, setpoints
PSG502-S nickel, setpoints
PSG510-S tungsten, setpoints, ceramic feedthroughs
PSG512-S nickel, setpoints, ceramic feedthroughs
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | ±15% |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | ±50% |
| 100 … 1000 mbar | % of reading | ±50% |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | none |
| Setting range | mbar | ‒ |
| Hysteresis | % of reading | ‒ |
| Relay contact | ‒ | |
| Relay contact: Switching time | ms | ‒ |
| Materials exposed to vacuum | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 |
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | |
| 100 … 1000 mbar | % of reading | |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | 2 |
| Setting range | mbar | 2 x 10-3 … 500 |
| Hysteresis | % of reading | 10% above lower threshold |
| Relay contact | 30 | |
| Relay contact: Switching time | ms | <20 |
| Materials exposed to vacuum | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 |
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | |
| 100 … 1000 mbar | % of reading | |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | 2 |
| Setting range | mbar | 2 x 10-3 … 500 |
| Hysteresis | % of reading | 10% above lower threshold |
| Relay contact | 30 | |
| Relay contact: Switching time | ms | <20 |
| Materials exposed to vacuum | glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 |
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | |
| 100 … 1000 mbar | % of reading | |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | 2 |
| Setting range | mbar | 2 x 10-3 … 500 |
| Hysteresis | % of reading | 10% above lower threshold |
| Relay contact | 30 | |
| Relay contact: Switching time | ms | <20 |
| Materials exposed to vacuum | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 |
| Measurement range | V | +1.9 … +10.0 |
| Accuracy(N2) | ||
| 1 x 10-3 … 100 mbar | % of reading | |
| 5 x 10-4 … 1 x 10-3 mbar | % of reading | |
| 100 … 1000 mbar | % of reading | |
| Repeatability (air) | ||
| 1 x 10-3 … 100 mbar | % of reading | 2% |
| Admissible temperature | ||
| Operation | °C | +5 … +60 |
| Vacuum connection (1) | °C | 80 / 250 (2) |
| Storage | °C | -20 … +65 |
| Supply voltage | ||
| At gauge | V (dc) | +14 …+30 |
| Ripple | V (p-p) | ≤1 |
| Power consumption | W | ≤1 |
| Setpoint | ||
| Number of setpoints | Number of setpoints | 2 |
| Setting range | mbar | 2 x 10-3 … 500 |
| Hysteresis | % of reading | 10% above lower threshold |
| Relay contact | 30 | |
| Relay contact: Switching time | ms | <20 |
| Materials exposed to vacuum | AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 |
Part Number
Accessories
Spare Parts
| PSG500 tungsten | |
| 350-060 | PSG500 DN 16 ISO-KF. |
| 350-061 | PSG500 1/8" NPT |
| 350-062 | PSG500 DN 16 CF-R |
| 350-063 | PSG500 1/2" Tube |
| 350-064 | PSG500 8-VCR (1/2") |
| 350-065 | PSG500 4-VCR (1/4") |
| 350-066 | PSG500 7/16-20 UNF |
| 350-067 | PSG500 DN 16 ISO-KF, ext. body |
| 350-068 | PSG500 DN 16 CF-R, ext. body |
| PSG500-S tungsten, setpoints | |
| 350-080 | PSG500-S DN 16 ISO-KF |
| 350-081 | PSG500-S 1/8" NPT |
| 350-082 | PSG500-S DN 16 CF-R |
| 350-083 | PSG500-S 1/2" Tube |
| 350-084 | PSG500-S 8-VCR (1/2") |
| 350-085 | PSG500-S 4-VCR (1/4") |
| 350-086 | PSG500-S 7/16-20 UNF |
| 350-087 | PSG500-S DN 16 ISO-KF, ext. body |
| 350-088 | PSG500-S DN 16 CF-R, ext. body |
| PSG502-S nickel, setpoints | |
| 350-140 | PSG502-S DN 16 ISO-KF |
| 350-141 | PSG502-S 1/8" NPT |
| 350-142 | PSG502-S DN 16 CF-R |
| 350-143 | PSG502-S 1/2" Tube |
| 350-144 | PSG502-S 8-VCR (1/2") |
| 350-145 | PSG502-S 4-VCR (1/4") |
| 350-146 | PSG502-S 7/16-20 UNF |
| 350-147 | PSG502-S DN 16 ISO-KF, ext. body |
| 350-148 | PSG502-S DN 16 CF-R, ext. body |
| PSG510-S tungsten, setpoints, ceramic feedthroughs | |
| 350-200 | PSG510-S DN 16 ISO-KF |
| PSG512-S nickel, setpoints, ceramic feedthroughs | |
| 350-300 | PSG512-S DN 16 ISO-KF |
| PSG500 tungsten | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG500-S tungsten, setpoints | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG502-S nickel, setpoints | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG510-S tungsten, setpoints, ceramic feedthroughs | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG512-S nickel, setpoints, ceramic feedthroughs | |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 350-050 | Power Supply, PxG5xx,G-Cable FCC,1.8m |
| PSG500 tungsten | |
| 350-920 | PSG500 Spare Sensor DN 16 KF |
| 350-921 | PSG500 Spare Sensor 1/8" NPT |
| 350-922 | PSG500 Spare Sensor DN 16 CF-R |
| 350-923 | PSG500 Spare Sensor 1/2" Tube |
| 350-924 | PSG500 Spare Sensor 8-VCR (1/2") |
| 350-925 | PSG500 Spare Sensor 7/16-20 UNF |
| 350-926 | PSG500 Spare Sensor 4-VCR (1/4") |
| 350-927 | PSG500 Spare Sensor DN 16 KF,ext.body |
| 350-928 | PSG500 Spare Sensor DN 16 CF-R,ext.body |
| PSG500-S tungsten, setpoints | |
| 350-920 | PSG500 Spare Sensor DN 16 KF |
| 350-921 | PSG500 Spare Sensor 1/8" NPT |
| 350-922 | PSG500 Spare Sensor DN 16 CF-R |
| 350-923 | PSG500 Spare Sensor 1/2" Tube |
| 350-924 | PSG500 Spare Sensor 8-VCR (1/2") |
| 350-925 | PSG500 Spare Sensor 7/16-20 UNF |
| 350-926 | PSG500 Spare Sensor 4-VCR (1/4") |
| 350-927 | PSG500 Spare Sensor DN 16 KF,ext.body |
| 350-928 | PSG500 Spare Sensor DN 16 CF-R,ext.body |
| PSG502-S nickel, setpoints | |
| 350-900 | PSG502 Spare Sensor DN 16 KF |
| 350-901 | PSG502 Spare Sensor 1/8" NPT |
| 350-902 | PSG502 Spare Sensor DN 16 CF-R |
| 350-903 | PSG502 Spare Sensor 1/2" Tube |
| 350-904 | PSG502 Spare Sensor 8-VCR (1/2") |
| 350-905 | PSG502 Spare Sensor 7/16-20 UNF |
| 350-906 | PSG502 Spare Sensor 4-VCR (1/4") |
| 350-907 | PSG502 Spare Sensor DN 16 KF,ext.body |
| 350-908 | PSG502 Spare Sensor DN 16 CF-R,ext.body |
| PSG510-S tungsten, setpoints, ceramic feedthroughs | |
| 350-930 | PSG510 Spare Sensor DN 16 KF |
| PSG512-S nickel, setpoints, ceramic feedthroughs | |
| 350-940 | PSG512 Spare Sensor DN 16 KF |
다운로드
매뉴얼
3D 파일
350-060 PSG500 DN 16 ISO-KF
zip
•
195,3 KB
•
3D 파일
350-061 PSG500 1/8" NPT
zip
•
271,2 KB
•
3D 파일
350-062 PSG500 DN 16 CF-R
zip
•
284,1 KB
•
3D 파일
350-063 PSG500 1/2" tube
zip
•
265,9 KB
•
3D 파일
350-064 PSG500 8 VCR®
zip
•
279,6 KB
•
3D 파일
350-065 PSG500 4 VCR®
zip
•
278,4 KB
•
3D 파일
350-066 PSG500 7/16-20 UNF
zip
•
277,9 KB
•
3D 파일
350-067 PSG500 DN 16 ISO-KF long tube
zip
•
281,0 KB
•
3D 파일
350-068 PSG500 DN 16 CF-R long tube
zip
•
295,4 KB
•
3D 파일
350-072 PSG500 G1/8"
stp
•
2,2 MB
•
3D 파일
350-080 PSG500-S DN 16 ISO-KF
zip
•
319,0 KB
•
3D 파일
350-081 PSG500-S 1/8" NPT
zip
•
342,8 KB
•
3D 파일
350-082 PSG500-S DN 16 CF-R
zip
•
355,3 KB
•
3D 파일
350-083 PSG500-S 1/2" tube
zip
•
337,7 KB
•
3D 파일
350-084 PSG500-S 8 VCR®
zip
•
351,4 KB
•
3D 파일
350-085 PSG500-S 4 VCR®
zip
•
350,3 KB
•
3D 파일
350-086 PSG500-S 7/16-20 UNF
zip
•
349,7 KB
•
3D 파일
350-087 PSG500-S DN 16 ISO-KF long tube
zip
•
281,0 KB
•
3D 파일
350-088 PSG500-S DN 16 CF-R long tube
zip
•
367,1 KB
•
3D 파일
350-140 PSG502-S DN 16 ISO-KF
zip
•
295,4 KB
•
3D 파일
350-141 PSG502-S 1/8" NPT
zip
•
342,8 KB
•
3D 파일
350-142 PSG502-S DN 16 CF-R
zip
•
355,3 KB
•
3D 파일
350-143 PSG502-S 1/2" tube
zip
•
337,7 KB
•
3D 파일
350-144 PSG502-S 8 VCR®
zip
•
351,4 KB
•
3D 파일
350-145 PSG502-S 4 VCR®
zip
•
350,3 KB
•
3D 파일
350-146 PSG502-S 7/16-20 UNF
zip
•
349,7 KB
•
3D 파일
350-147 PSG502-S DN 16 ISO-KF long tube
zip
•
281,0 KB
•
3D 파일
350-148 PSG502-S DN 16 CF-R long tube
zip
•
367,1 KB
•
3D 파일
